MBE Growth of III-Nitride Semiconductors

by Ruediger Held

Submitted May 1995

Title Page

Abstract

Acknowledgements

Table of Contents

1. PERSONAL BIOGRAPHY

2. DEGREE PROGRAM

3. TRANSCRIPT

4. OTHER SCHOLARLY ACTIVITY

5. INTRODUCTION TO III-V NITRIDES

5.1 Introduction

5.2 Properties

5.3 Applications

5.4 Growth Methods

5.4.1 Introduction
5.4.2 CVD
5.4.3 MBE

6. JET THEORY AND DESIGN EQUATIONS

6.1 Introduction

6.2 Jet Theory and Design Equations Summary
6.2.1 Introduction
6.2.2 Terminal Velocity
6.2.3 Background Pressure
6.2.4 Velocity Dispersion, Terminal Speed Ratio, and Terminal Mach Number
6.2.5 Beam Intensity and Attenuation
6.2.6 Clustering

6.3 Conclusions

7. DEVELOPMENT OF A COMPACT NH_3 JET

7.1 Introduction

7.2 Original N2 Jet

7.3 NH3 Jet Prototype #1

7.3.1 Design
7.3.2 Intensity Characterization

7.4 NH3 Jet Prototype #2

7.5 NH3 Jet Performance Compared to Leak Valve

7.6 NH3 Dissociation

7.7 Seeding Effect of Dissociated NH_3

7.8 Suggested New Jet

7.9 RF Heating

7.10 Conclusions

8. GEN II MBE SYSTEM MODIFICATIONS AND SUBSTRATES

8.1 Introduction

8.2 NH_3 Compatibility

8.3 Sample Heating and Substrate Holders

8.4 Substrates and Substrate Preparation

9. GROWTH MONITORING USING RHEED

9.1 Introduction to RHEED

9.2 Growth of AlN and GaN on c-Plane Sapphire

9.3 Growth of GaN on a-Plane Sapphire

9.4 Growth of cubic GaN on MgO 001 and GaAs 001

9.5 GaN Reconstructions on c-plane GaN

10. GAN GROWTH INVESTIGATIONS

10.1 Introduction

10.2 Determining Growth Conditions using RHEED

10.3 Substrate Temperature Calibration

10.4 GaN Decomposition

10.5 Growth Rate Model for AlN, GaN, and InN

10.6 Hysteresis of `Dips'

10.7 Growth Rates

10.8 Effect of RHEED on Growth Rate

10.9 Search for Oscillations

10.10 Growth Results: Summary

11. POST GROWTH CHARACTERIZATION OF NITRIDE FILMS

11.1 Introduction

11.2 Auger Spectroscopy

11.3 Auger Depth Profiling

11.4 Rutherford Backscattering Spectroscopy (RBS)

11.5 X-Ray Analysis

11.6 Other Methods of Characterization Used and Planned

12. CONCLUSIONS AND FUTURE PLANS

13. APPENDIX

13.1 Jet Theory

13.1.1 Introduction
13.1.2 Structure of a Jet Expansion
13.1.3 Terminal Velocity
13.1.4 Continuum Properties of the Jet Expansion
13.1.5 Nonequilibrium Kinetic Effects
13.1.6 Free Jet Intensities
13.1.7 Velocity Dispersion
13.1.8 Temperature
13.1.9 Clustering and Condensation
13.1.10 Seeding

13.2 TABLE OF FIGURES

13.3 TABLE OF TABLES

13.4 TABLE OF REFERENCES

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