11.6 Post Growth Characterization of Nitride Films - Other Methods of Characterization
Used and Planned
4 probe measurements (Hall effect and conductivity) was employed to obtain
carrier concentrations and mobilities (Ref. 51). Secondary Ion Mass Spectroscopy
(SIMS) was used to check for Sb contamination (Ref. 52). Atomic Force Microscopy
(AFM) was employed to check surface roughness of GaN as well as a sapphire
substrate (Ref. 53). Photoluminescence was used to check the GaN bandgap
and compare our material to the literature (Ref. 54).
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